Scanned Probe Oxidation onp-GaAs(100) Surface with an Atomic Force Microscopy
Locally anodic oxidation has been performed to fabricate the nanoscale oxide structures onp-GaAs(100) surface, by using an atomic force microscopy (AFM) with the conventional and carbon nanotube (CNT)-attached probes. The results can be utilized to fabricate the oxide nanodots under ambient conditio...
| Main Authors: | , |
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| Format: | Online |
| Language: | English |
| Published: |
Springer
2008
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3244860/ |