Efficient visible luminescence of nanocrystalline silicon prepared from amorphous silicon films by thermal annealing and stain etching
Films of nanocrystalline silicon (nc-Si) were prepared from hydrogenated amorphous silicon (a-Si:H) by using rapid thermal annealing. The formed nc-Si films were subjected to stain etching in hydrofluoric acid solutions in order to passivate surfaces of nc-Si. The optical reflectance spectroscopy re...
Main Authors: | , , , , , , , , |
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Format: | Online |
Language: | English |
Published: |
Springer
2011
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Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211438/ |