Deposition Rates on Stainless Steel Substrates of Different Surface Roughnesses Under Different Operating Conditions using Thermal CVD
A series of experimental tests were carried out to observe the deposition rates on different stainless steel substrates of different surface roughnesses under different operating conditions using a hot filament thermal chemical vapour deposition (CVD) reactor. The test parameters include gas flow ra...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Inderscience Enterprises Ltd.
2016
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/14162/ http://umpir.ump.edu.my/id/eprint/14162/ http://umpir.ump.edu.my/id/eprint/14162/ http://umpir.ump.edu.my/id/eprint/14162/1/fkp-2016-dm-Deposition%20Rates%20on%20Stainless%20Steel%20Substrates.pdf |