Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method
In this article we develop a fully self consistent mathematical model describing the formation of a hydrogen plasma in a microwave power assisted chemical vapour deposition (MPA-CVD) reactor employed for the manufacture of synthetic diamond. The underlying multi-physics model includes constituent eq...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2017
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| Online Access: | http://eprints.nottingham.ac.uk/43461/ http://eprints.nottingham.ac.uk/43461/ http://eprints.nottingham.ac.uk/43461/ http://eprints.nottingham.ac.uk/43461/1/paper.pdf |