Comparative analysis of zinc oxide and aluminium doped ZnO for GHz CMOS MEMS surface acoustic wave resonator
CMOS integration in RF MEMS have become dominant due to the growing demand of mobile and wireless communication system. Usage of off chip resonators is not efficient since it leads to large area and high interfacing loss. Integration of CMOS with SAW resonators is a possible solution to reduce the l...
| Main Authors: | , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2013
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/46637/ http://irep.iium.edu.my/46637/ http://irep.iium.edu.my/46637/1/46637.pdf |