Development of a micromolding process
This paper presents the simulating and experimental results of a micromolding process for fabrication of threedimensional (3D) microcomponents. The maskless process utilizes a micro electrical discharging system for bulk machining, then finish machining using focused-ion beam to sputter the mold m...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2001
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27139/ http://irep.iium.edu.my/27139/1/035_DTIP-SPIE_France_2001_317-328_Hung.pdf |