Micro Electro Discharge Milling for Microfabrication

Miniaturization of product is increasingly in demand for applications in numerous fields, such as aerospace, automotive, biomedical, healthcare, electronics, environmental, communications and consumer products. Researchers have been working on the microsystems that promise to enhance health care,...

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Main Authors:	Ali, Mohammad Yeakub, Reyad, Mehfuz, Khan, Ahsan Ali, Ismail, Ahmad Faris
Format:	Book Chapter
Language:	English
Published:	In-Tech 2005
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/2502/ http://irep.iium.edu.my/2502/1/InTech_Book_Chapter_uEDMilling.pdf

id	iium-2502
recordtype	eprints
spelling	iium-25022017-08-09T02:36:29Z http://irep.iium.edu.my/2502/ Micro Electro Discharge Milling for Microfabrication Ali, Mohammad Yeakub Reyad, Mehfuz Khan, Ahsan Ali Ismail, Ahmad Faris TJ Mechanical engineering and machinery TS Manufactures Miniaturization of product is increasingly in demand for applications in numerous fields, such as aerospace, automotive, biomedical, healthcare, electronics, environmental, communications and consumer products. Researchers have been working on the microsystems that promise to enhance health care, quality of life and economic growth. Some examples are micro-channels for micro fuel cell, lab-on-chips, shape memory alloy ‘stents’, fluidic graphite channels for fuel cell applications, miniature actuators and sensors, medical devices, etc. (Madou, 2002; Hsu, 2002). Thus, miniaturization technologies are perceived as potential key technologies. One bottleneck of product miniaturization is the lack of simpler and cheaper fabrication techniques. Currently the common techniques are based on silicon processing techniques, where silicon-based materials are processed through wet and dry chemical etching. These techniques are suitable for microelectronics, limited to few silicon-based materials and restricted to simple two dimensional (2D) or pseudo three dimensional (2.5D) planar geometries. Other fabrication processes, such as LiGA (lithography, electroforming and molding), laser, ultrasonic,focused ion beam (FIB), micro electro discharge machining (EDM), mechanical micromilling, etc. are expensive and required high capital investment. Moreover these processes are limited to selected materials and low throughput (Ehmann et al. 2002).A less expensive and simpler microfabrication technique is sought to produce commercially viable microcomponents. Micro electro discharge (ED) milling, a new branch of EDM, has potential to fabricate functional microcomponents. The influences of micro ED milling process parameters on surface roughness, tool wear ratio and material removal rate are not fully identified yet. Therefore, modeling of ED milling process parameters for surface roughness, tool wear ratio and material removal rate are necessary. In-Tech 2005 Book Chapter PeerReviewed application/pdf en http://irep.iium.edu.my/2502/1/InTech_Book_Chapter_uEDMilling.pdf Ali, Mohammad Yeakub and Reyad, Mehfuz and Khan, Ahsan Ali and Ismail, Ahmad Faris (2005) Micro Electro Discharge Milling for Microfabrication. In: Micromachining. In-Tech, Croatia, pp. 1-28. (In Press)
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TJ Mechanical engineering and machinery TS Manufactures
spellingShingle	TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Reyad, Mehfuz Khan, Ahsan Ali Ismail, Ahmad Faris Micro Electro Discharge Milling for Microfabrication
description	Miniaturization of product is increasingly in demand for applications in numerous fields, such as aerospace, automotive, biomedical, healthcare, electronics, environmental, communications and consumer products. Researchers have been working on the microsystems that promise to enhance health care, quality of life and economic growth. Some examples are micro-channels for micro fuel cell, lab-on-chips, shape memory alloy ‘stents’, fluidic graphite channels for fuel cell applications, miniature actuators and sensors, medical devices, etc. (Madou, 2002; Hsu, 2002). Thus, miniaturization technologies are perceived as potential key technologies. One bottleneck of product miniaturization is the lack of simpler and cheaper fabrication techniques. Currently the common techniques are based on silicon processing techniques, where silicon-based materials are processed through wet and dry chemical etching. These techniques are suitable for microelectronics, limited to few silicon-based materials and restricted to simple two dimensional (2D) or pseudo three dimensional (2.5D) planar geometries. Other fabrication processes, such as LiGA (lithography, electroforming and molding), laser, ultrasonic,focused ion beam (FIB), micro electro discharge machining (EDM), mechanical micromilling, etc. are expensive and required high capital investment. Moreover these processes are limited to selected materials and low throughput (Ehmann et al. 2002).A less expensive and simpler microfabrication technique is sought to produce commercially viable microcomponents. Micro electro discharge (ED) milling, a new branch of EDM, has potential to fabricate functional microcomponents. The influences of micro ED milling process parameters on surface roughness, tool wear ratio and material removal rate are not fully identified yet. Therefore, modeling of ED milling process parameters for surface roughness, tool wear ratio and material removal rate are necessary.
format	Book Chapter
author	Ali, Mohammad Yeakub Reyad, Mehfuz Khan, Ahsan Ali Ismail, Ahmad Faris
author_facet	Ali, Mohammad Yeakub Reyad, Mehfuz Khan, Ahsan Ali Ismail, Ahmad Faris
author_sort	Ali, Mohammad Yeakub
title	Micro Electro Discharge Milling for Microfabrication
title_short	Micro Electro Discharge Milling for Microfabrication
title_full	Micro Electro Discharge Milling for Microfabrication
title_fullStr	Micro Electro Discharge Milling for Microfabrication
title_full_unstemmed	Micro Electro Discharge Milling for Microfabrication
title_sort	micro electro discharge milling for microfabrication
publisher	In-Tech
publishDate	2005
url	http://irep.iium.edu.my/2502/ http://irep.iium.edu.my/2502/1/InTech_Book_Chapter_uEDMilling.pdf
first_indexed	2018-09-07T03:01:14Z
last_indexed	2018-09-07T03:01:14Z
_version_	1610916062362075136

Micro Electro Discharge Milling for Microfabrication

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