Surface finish prediction models for precision grinding of silicon
Conventional grinding of silicon substrates results in poor surface quality unless they are machined in ductile mode on expensive ultra-precision machine tools. However, precision grinding can be used to generate massive ductile surfaces on silicon so that the polishing time can be reduced imme...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/14277/ http://irep.iium.edu.my/14277/ http://irep.iium.edu.my/14277/5/Surface_finish_prediction_models_for_precision_grinding_of_silicon2012.pdf |