Design and analysis of a novel dual-mass MEMS resonant output gyroscope
This paper presents the design and analysis of a novel dual-mass microelectromechanical systems (MEMS) resonant output gyroscope (ROG), which can effectively eliminate the influence of common-mode disturbance, such as the linear acceleration, on the gyroscope working mode by the design of dual-mass...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-02-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5020176 |