Computational Study of Surface Deposition and Gas Phase Powder Formation during Spinel Chemical Vapor Deposition Processes
Chemical vapor deposition (CVD) processes are often employed to produce high quality materials. In some applications, a relatively fast deposition rate is required to produce thick pieces of material, e.g., on the order of centimeter, in an economical manner. However, in some processes the formation...
| Main Authors: | , , , , , , , |
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| Format: | Journal Article |
| Published: |
American Chemical Society
2013
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| Online Access: | http://hdl.handle.net/20.500.11937/5855 |