Synthesis and characterisation of chemical bath deposited TiO2 thin-films

A series of titania thin films was prepared by chemical bath deposition (CBD) of TiCl3 on indium tin oxside (ITO) glass at room temperature, followed by calcinations at 500°C for 4h. The effect of cyclic deposition on phase composition, microstructure and electrical resistivity of TiO2 thin films wa...

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Bibliographic Details
Main Authors: Manurung, P., Putri, Y., Simanjuntak, W., Low, It Meng
Format: Journal Article
Published: Elsevier Science Ltd 2013
Subjects:
Online Access:http://hdl.handle.net/20.500.11937/29345