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An improved structural design...
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An improved structural design for accelerometers based on slotted eight-beam structure
Bibliographic Details
Main Authors:
Peng, Wang
,
Yulong, Zhao
,
You, Zhao
,
Qi, Zhang
,
Anjiang, Cai
Format:
text
Language:
eng
Published:
Emerald
2018
Subjects:
MEMS,Accelerometer,Slotted beam,Structural design
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