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Silicon nanowire fabrication
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Silicon nanowire fabrication
Bibliographic Details
Main Authors:
Tijjani, Adam
,
U., Hashim
Format:
text
Language:
eng
Published:
Emerald
2014
Subjects:
Silicon,Trimming,Shallow,Anisotropic,Etching,Silicon-on-insulator,Photolithography,Current–voltage,Semiconductor,ICP-RIE
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Description
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