Control characteristics: a case study on semiconductor manufacturing

Control characteristics: a case study on semiconductor manufacturing

Bibliographic Details
Main Authors: Hironobu, Kawamura, Ken, Nishina, Masanobu, Higashide, Tomomichi, Suzuki
Format: text
Language:eng
Published: Emerald 2012
Subjects:
Statistical process control,Process control,Vapour pressure,LPCVD,Process rate,Automatic process control,Control chart,Semiconductors,Statistical quality control,Quality control

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