An automatic optical inspection system for measuring a microlens array with an optical interferometric microscope and genetic algorithm

An automatic optical inspection system for measuring a microlens array with an optical interferometric microscope and genetic algorithm

Bibliographic Details
Main Authors: Shih‐Wei, Yang, Chern‐Sheng, Lin, Shir‐Kuan, Lin, Shu‐Hsien, Fu, Mau‐Shiun, Yeh
Format: text
Language:eng
Published: Emerald 2013
Subjects:
Inspection,Automation,Genetic algorithms,Surface properties of materials,Automatic optical inspection system,Microlens array,Surface profile

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