An industrial solution to automatic robot calibration and workpiece pose estimation for semiconductor and gene‐chip microarray fabrication

Bibliographic Details
Main Authors:	Mingjun, Zhang, Weimin, Tao, William, Fisher, Tzyh‐Jong, Tarn
Format:	text
Language:	eng
Published:	Emerald 2006
Subjects:	Automation,Semiconductor devices,Manufacturing industries

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