Internal Friction and Young's Modulus Measurements on SiO2 and Ta2O5 Films Done with an Ultra-High Q Silicon-Wafer Suspension

by Granata M., Balzarini L., Degallaix J., Dolique V., Flaminio R., Forest D., Hofman D., Michel C., Pedurand R., Pinard L., Sassolas B., Straniero N., Teillon J., Cagnoli G.
Published 2015-04-01