High-performance III-V MOSFET with nano-stacked high-k gate dielectric and 3D fin-shaped structure

by Chen, Szu-Hung, Liao, Wen-Shiang, Yang, Hsin-Chia, Wang, Shea-Jue, Liaw, Yue-Gie, Wang, Hao, Gu, Haoshuang, Wang, Mu-Chun
Published 2012