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Ekberg, Peter
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Ekberg, Peter
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Ekberg, Peter
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High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface
by
Ekberg
,
Peter
,
Su, Rong
,
Leach, Richard K.
Published 2017
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Article
2
High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface
by
Su, Rong
,
Ekberg
,
Peter
,
Leach, Richard K.
Published 2017
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