Development Of SiO2 On 4H-SiC By Direct Thermal Oxidation And Post Oxidation Annealing In HNO3 & H2O Vapour

by Banu , Poobalan
Published 2014

Effects of wet-oxidized 4H-SiC annealed in HNO3/H2O vapour

by Banu, Poobalan, Jeong, Hyun Moon, Sang-Cheol, Kim, Sung-Jae, Joo, Wook, Bahng, In, Ho Kang, Nam-Kyun, Kim, Kuan, Yew Cheong
Published 2013