Search Results - "Microlithography"

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  1. 1
    Handbook of VLSI microlithography : principles, technology and applications

    Handbook of VLSI microlithography : principles, technology and applications by Glendinning, William B., Helbert, John N.

    Published 1991
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  2. 2
    Metrology, inspection, and process control for microlithography XVII

    Metrology, inspection, and process control for microlithography XVII by Herr, Daniel J.

    Published 2003
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