Showing
1 - 1
results of
1
Skip to content
VuFind
All Fields
Title
Author
Subject
Call Number
ISBN/ISSN
Tag
Accession No
Find
Advanced
Search Results - "Integrated circuits Measurement"
Search Results - "Integrated circuits Measurement"
Suggested Topics within your search.
Suggested Topics within your search.
Congresses
1
Inspection
1
Integrated circuits
1
Measurement
1
Microlithography
1
Showing
1 - 1
results of
1
Refine Results
Sort
Relevance
Date Descending
Date Ascending
Call Number
Author
Title
1
Metrology, inspection, and process control for microlithography XVII
by
Herr, Daniel J.
Published 2003
Subjects:
Call Number:
Loading…
Located:
Loading…
Loading…
QR Code
Search Tools:
RSS Feed
Email Search
Back
Refine Results
Page will reload when a filter is selected or excluded.
Library
Gong Badak Campus
1 results
1
Call Number
T - Technology
1 results
1
Item Category
Close Access
1 results
1
Format
Book
1 results
1
Author
Herr, Daniel J.
1 results
1
Society of Photo-optical Instrumentation Engineers
1 results
1
The International Society for Optical Engineering
1 results
1
Genre
Congresses
1 results
1
Year of Publication
From:
To: