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Microlithography
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Integrated circuits
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Microlithography
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Inspection
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Measurement
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Very large scale integration
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Handbook of VLSI microlithography : principles, technology and applications
by
Glendinning, William B.
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Helbert, John N.
Published 1991
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Metrology, inspection, and process control for microlithography XVII
by
Herr, Daniel J.
Published 2003
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Glendinning, William B.
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Society of Photo-optical Instrumentation Engineers
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