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  1. 1

    MEMS/MOEMS advances in photonic commmunications, sensing, metrology, packaging and assembly by Behringer, Uwe F.W

    Published 2003
  2. 2

    Microsystems engineering Metrology and inspection III by Goreck, Christophe

    Published 2003
  3. 3
  4. 4

    Advanced MEMS packaging by Lau, John H.

    Published 2010
    NetLibrary
  5. 5

    Wireless MEMS networks and applications

    Published 2017
  6. 6