Handbook of thin film deposition : techniques, processes, and technologies
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Waltham, Massachusetts :
Elsevier ,
c2012
|
| Edition: | 3rd ed |
| Subjects: |
Table of Contents:
- 1. A perspective on today's scaling challenges and possible future directions
- 2. Scaling and its implications for the integration and design of thin film and processes
- 3. Scaling-its effects on heat generation and cooling of devices. A "Thermal Moore's" law?
- 4. Sputter processing
- 5. Thin-film strain engineering and pattern effects in dielectrics CVD
- 6. Equipment and manufacturability issues in CVD processes
- 7. CMP method and practice
- 8. Process technology for copper interconnects
- 9. Optical thin films
- 10. Thin films in photovoltaics
- 11. Application of thin films in semiconductor memories