Handbook of thin film deposition : techniques, processes, and technologies

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Handbook of thin film deposition : techniques, processes, and technologies

Bibliographic Details
Main Author:	Seshan, Krishna (Author)
Format:	Book
Language:	English
Published:	Waltham, Massachusetts : Elsevier , c2012
Edition:	3rd ed
Subjects:	Thin film devices > Design and construction Thin films

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