Handbook of thin film deposition : techniques, processes, and technologies
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| Format: | Book |
| Language: | English |
| Published: |
Waltham, Massachusetts :
Elsevier ,
c2012
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| Edition: | 3rd ed |
| Subjects: |
| Physical Description: | xviii, 392 p. : ill. ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 1437778739 (hardback : alk. paper) 1437778747 (ebook) 9781437778731 (hardback : alk. paper) 9781437778748 (ebook) |