Microfabrication for industrial applications

Bibliographic Details
Main Author: Luttge, Regina (Author)
Format: Book
Language:English
Published: Boston, Massachusetts : Elsevier/William Andrtew , c2011
Series:Micro & nano technologies series
Subjects:
Table of Contents:
  • 1. Introduction
  • 2. Basic technologies for microsystems
  • 3. Advanced microfabrication methods
  • 4. Nanotechnology
  • 5. Micromechanical transducers
  • 6. Chemical and biological sensors at component and device level
  • 7. Microfluidic components, devices and integrated lab-on-a-chip systems
  • 8. Microfabrication for novel products in drug delivery : an example
  • 9. Reflective comments and conclusions