Microfabrication for industrial applications
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston, Massachusetts :
Elsevier/William Andrtew ,
c2011
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| Series: | Micro & nano technologies series
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| Subjects: |
Table of Contents:
- 1. Introduction
- 2. Basic technologies for microsystems
- 3. Advanced microfabrication methods
- 4. Nanotechnology
- 5. Micromechanical transducers
- 6. Chemical and biological sensors at component and device level
- 7. Microfluidic components, devices and integrated lab-on-a-chip systems
- 8. Microfabrication for novel products in drug delivery : an example
- 9. Reflective comments and conclusions