Microfabrication for industrial applications

Bibliographic Details
Main Author: Luttge, Regina (Author)
Format: Book
Language:English
Published: Boston, Massachusetts : Elsevier/William Andrtew , c2011
Series:Micro & nano technologies series
Subjects:

MARC

LEADER 00000cam a2200000 7i4500
001 0000078410
005 20130120093000.0
008 110404s2011 mau eng
020 |a 0815515820 (hardback : alk. paper) 
020 |a 9780815515821 (hardback : alk. paper) 
050 0 0 |a TS183   |b .L88 2011 
090 0 0 |a TS183   |b .L88 2011 
100 1 |a Luttge, Regina ,   |e author 
245 1 0 |a Microfabrication for industrial applications   |c Regina Luttge 
260 |a Boston, Massachusetts :   |b Elsevier/William Andrtew ,   |c c2011 
300 |a xvii, 289 p. :   |b ill. ;   |c 24 cm. 
490 1 |a Micro & nano technologies series 
504 |a Includes bibliographical references and index 
505 0 |a 1. Introduction -- 2. Basic technologies for microsystems -- 3. Advanced microfabrication methods -- 4. Nanotechnology -- 5. Micromechanical transducers -- 6. Chemical and biological sensors at component and device level -- 7. Microfluidic components, devices and integrated lab-on-a-chip systems -- 8. Microfabrication for novel products in drug delivery : an example -- 9. Reflective comments and conclusions 
650 0 |a Manufacturing processes 
650 0 |a Microfabrication 
999 |a 1000151405   |b Book   |c OPEN SHELF (30 DAYS)   |e Gong Badak Campus