Microfabrication for industrial applications
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston, Massachusetts :
Elsevier/William Andrtew ,
c2011
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| Series: | Micro & nano technologies series
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| Subjects: |
| Physical Description: | xvii, 289 p. : ill. ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0815515820 (hardback : alk. paper) 9780815515821 (hardback : alk. paper) |