Materials science in microelectronics
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Amsterdam :
Elsevier ,
2005-
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| Edition: | 2nd ed |
| Subjects: |
Table of Contents:
- Vol. I The relationships between thin film processing and structure
- Vol. II The effects of structure on properties in thin films