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00000cam a2200000 7i4500 |
| 001 |
0000050504 |
| 005 |
20071008093000.0 |
| 008 |
051001m20059999ne 000 0 eng |
| 020 |
|
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|a 0080446396 (vol. II)
|
| 020 |
|
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|a 008044640X (vol. I)
|
| 090 |
0 |
0 |
|a TK7871.15.F5
|b M32 2005
|
| 100 |
1 |
|
|a Machlin, E. S. ,
|e author
|
| 245 |
1 |
0 |
|a Materials science in microelectronics
|c E. S. Machlin
|
| 250 |
|
|
|a 2nd ed
|
| 260 |
|
|
|a Amsterdam :
|b Elsevier ,
|c 2005-
|
| 300 |
|
|
|a 2 v. :
|b ill. ;
|c 24 cm.
|
| 504 |
|
|
|a Includes bibliographical references and index
|
| 505 |
0 |
|
|a Vol. I The relationships between thin film processing and structure -- Vol. II The effects of structure on properties in thin films
|
| 650 |
|
0 |
|a Microelectronics
|
| 650 |
|
0 |
|a Thin films
|
| 999 |
|
|
|a 1000111320
|b Book
|c OPEN SHELF (30 DAYS)
|e Gong Badak Campus
|
| 999 |
|
|
|a 1000111321
|b Book
|c OPEN SHELF (30 DAYS)
|e Gong Badak Campus
|