Characterization and metrology for ULSI technology 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003 editors, Davig G. Seiler ...[et al.] - International Conference on Characterization and Metrology for ULSI Technology 2003 Austin, Texas; Seiler, David G.; National Institute of Standards and Technology (Melville, NY American Institute of Physics, 2003)
Keywords: Integrated circuits -- Ultra large scale integration -- Congresses; Integrated circuits -- Ultra large scale integration -- Congresses -- Software