Microsystems engineering Metrology and inspection III - Goreck, Christophe; The International Society for Optical Engineering; European Optical Society; Society of Photo-optical Instrumentation Engineers; Wissenschaftliche Gesellschaft Lasertechnik (Washington SPIE, 2003)
Keywords: Interferometry -- Congresses; Mensuration -- Congresses; Microelectromechanical systems -- Congresses; Microelectronics -- Congresses; Optical detectors -- Industrial applications -- Congresses; Quality control -- Optical methods -- Congresses