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| 020 |
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|a 0819450154
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| 090 |
0 |
0 |
|a TS156.2
|b .M53 2003
|
| 245 |
1 |
0 |
|a Microsystems engineering :
|b Metrology and inspection III
|
| 260 |
2 |
|
|a Washington :
|b SPIE ,
|c c2003
|
| 300 |
|
|
|a ix, 210 p. :
|b ill ;
|c 28 cm.
|
| 440 |
0 |
0 |
|a SPIE proceedings series
|v 5145
|
| 504 |
|
|
|a Includes bibliographical references and author index
|
| 650 |
|
0 |
|a Interferometry
|v Congresses
|
| 650 |
|
0 |
|a Mensuration
|x Congresses.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|x Congresses
|
| 650 |
|
0 |
|a Microelectronics
|x Congresses
|
| 650 |
|
0 |
|a Optical detectors
|x Industrial applications
|v Congresses
|
| 650 |
|
0 |
|a Quality control
|x Optical methods
|x Congresses
|
| 700 |
1 |
|
|a Goreck, Christophe ,
|e author
|
| 710 |
1 |
1 |
|a The International Society for Optical Engineering
|
| 710 |
1 |
2 |
|a European Optical Society
|
| 710 |
1 |
2 |
|a Society of Photo-optical Instrumentation Engineers
|
| 710 |
1 |
2 |
|a Wissenschaftliche Gesellschaft Lasertechnik
|
| 740 |
0 |
0 |
|a Proceedings of SPIE
|
| 999 |
|
|
|a 1000099381
|b Book
|c Close Access
|e Gong Badak Campus
|