Microsystems engineering : Metrology and inspection III

Microsystems engineering : Metrology and inspection III

Bibliographic Details
Main Author: Goreck, Christophe (Author)
Corporate Authors: The International Society for Optical Engineering, European Optical Society, Society of Photo-optical Instrumentation Engineers, Wissenschaftliche Gesellschaft Lasertechnik
Format: Book
Published: Washington : SPIE , c2003
Series:SPIE proceedings series 5145
Subjects:
Interferometry > Congresses
Mensuration > Congresses.
Microelectromechanical systems > Congresses
Microelectronics > Congresses
Optical detectors > Industrial applications > Congresses
Quality control > Optical methods > Congresses
Description
Physical Description:ix, 210 p. : ill ; 28 cm.
Bibliography:Includes bibliographical references and author index
ISBN:0819450154

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