Microsystems engineering Metrology and inspection III

Bibliographic Details
Main Author:	Goreck, Christophe (Author)
Corporate Authors:	The International Society for Optical Engineering, European Optical Society, Society of Photo-optical Instrumentation Engineers, Wissenschaftliche Gesellschaft Lasertechnik
Format:	Book
Published:	Washington SPIE c2003
Series:	SPIE proceedings series 5145
Subjects:	Interferometry > Congresses Mensuration > Congresses. Microelectromechanical systems > Congresses Microelectronics > Congresses Optical detectors > Industrial applications > Congresses Quality control > Optical methods > Congresses

Description
Physical Description:	ix, 210 p. ill 28 cm
ISBN:	0819450154

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