APA (7th ed.) Citation

Goreck, C. (2003). Microsystems engineering: Metrology and inspection III. SPIE.

Chicago Style (17th ed.) Citation

Goreck, Christophe. Microsystems Engineering: Metrology and Inspection III. Washington: SPIE, 2003.

MLA (9th ed.) Citation

Goreck, Christophe. Microsystems Engineering: Metrology and Inspection III. SPIE, 2003.

Warning: These citations may not always be 100% accurate.