Metrology, inspection, and process control for microlithography XVII

QR Code

Metrology, inspection, and process control for microlithography XVII

Bibliographic Details
Main Author:	Herr, Daniel J. (Author)
Corporate Authors:	The International Society for Optical Engineering, Society of Photo-optical Instrumentation Engineers
Format:	Book
Published:	Washington SPIE c2003
Series:	SPIE proceedings series 5038
Subjects:	Integrated circuits > Inspection > Congresses Integrated circuits > Measurement > Congresses Microlithography > Congresses

Similar Items

Handbook of VLSI microlithography : principles, technology and applications
by: Glendinning, William B., et al.
Published: (1991)

Characterization and metrology for ULSI technology 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003 editors, Davig G. Seiler ...[et al.]
by: Seiler, David G.
Published: (2003)

Encyclopedia of integrated circuits
by: Buchsbaum, Walter H., et al.
Published: (1987)

Integrated circuits the roles and impacts in technology developments
by: Hashim Saim 1928-
Published: (2010)

Beginner's guide to integrated circuits
by: Sinclair, Ian Robertson
Published: (1983)

Asas teknologi litar bersepadu
by: Fortino, Andres G.
Published: (1989)

Advanced Ta-based diffusion barriers for Cu interconnects [
by: Heubner, Renae
Published: (2009)

Proceedings of the 1st national conference on electronic design, Kangar, 18-19 May 2005 'nation's prosperity throught electronic design'
by: Puteh Saad
Published: (2005)

Analisis dan reka bentuk sistem VLSI
by: Masuri Othman
Published: (1994)

Electronic design with off-the-shelf integrated circuits
by: Meiksin, Z. H., et al.
Published: (1984)

Analog and digital electronic circuits fundamentals, analysis, and applications
by: Prasad, R.
Published: (2021)

Analysis and design of digital integrated circuits in deep submicron technology
by: Hodges, David A. (David Alvin), et al.
Published: (2004)

Reka bentuk VLSI kebolehujian
by: Zahari Mohamed Darus, et al.
Published: (1994)

Intergerated circuit fabrication technology
by: Elliott, David J.
Published: (1989)

Analog circuit design art, science, and personalities
by: Williams, Jim
Published: (1991)

Digital design principles and practices
by: Wakerly, John F.
Published: (2000)

Digital design from zero to one
by: Daniels, Jerry 1948-
Published: (1996)

Complete technology & design
by: Caldwell, Raymond
Published: (2005)

High-speed digital circuits
by: Shoji, Masakazu 1936-
Published: (1996)

Analog IC design with low-dropout regulators
by: Rincaon-Mora, Gabriel A. (Gabriel Alfonso)
Published: (2009)

VLSI circuits and systems in silicon
by: Brown, Andrew David
Published: (1991)

VLSI handbook
by: Einspruch, Norman G.
Published: (1985)

Fast circuit boards energy management
by: Morrison, Ralph

Modern VLSI design a systems approach
by: Wolf, Wayne Hendrix
Published: (1994)

Microelectronic circuits analysis and design
by: Rashid, M. H.
Published: (1998)

Integrated circuits in digital electronics
by: Barna, Arpad, et al.
Published: (1987)

System integration from transistor design to large scale integrated circuits
by: Hoffmann, Kurt
Published: (2004)

Appliacations of analog integrated circuits
by: Soclof, Sidney
Published: (1985)

Digital design with a introduction to the verilog hdl
by: Mano, M. Morris 1927-, et al.
Published: (2013)

Chemical vapor depossition of tungsten and tungsten silicides for VLSI/ULSI applications / by John E. J. Schmitz
by: Schmitz, John E. J.
Published: (1992)

Parallel processing architectures and VLSI hardware
by: DeCegama, Angel L.
Published: (1989)

Microchip fabrication a practical guide to semiconductor processing
by: Van Zant, Peter
Published: (2004)

Design of low-power coarse-grained reconfigurable architectures
by: Kim, Yoonjin, et al.
Published: (2011)

Managing the metrology system
by: Pennella, C. Robert
Published: (2004)

Optical metrology for arts and multimedia
by: Salimbeni, Renzo
Published: (2003)

Proceedings of the World Ethics and Integrity Forum 2005 : building trust and international cooperation in strengthening integrity
by: Mohd. Nizam Mohd. Ali, et al.
Published: (2005)

Proceedings of the rice Integrated Pest Management (IPM) conference Integrating science and people in rice pest management, 18-21 November 1996, Kuala Lumpur, Malaysia
by: Ali Abdul Hamid, et al.
Published: (1998)

Inspection and gaging
by: Kennedy, Clifford W. 1895-
Published: (1987)

Sampling inspection in statistical quality control
by: Guenther, William C., et al.
Published: (1977)

Proceedings of Asean Intergrity Dialogue (AID 2017) reinventing good governance through universal values
Published: (2018)