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0000047201 |
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20230404093000.0 |
| 008 |
040628s2003 |
| 020 |
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|a 0819448435
|
| 090 |
0 |
0 |
|a TK7874
|b .M43 2003
|
| 245 |
1 |
0 |
|a Metrology, inspection, and process control for microlithography XVII
|
| 260 |
2 |
|
|a Washington :
|b SPIE ,
|c c2003
|
| 300 |
|
|
|a 2 v.(xxvii, 1248 p.) :
|b ill.(some col.) ;
|c 28 cm.
|
| 440 |
0 |
0 |
|a SPIE proceedings series
|v 5038
|
| 504 |
|
|
|a Includes bibliographical references and author index
|
| 650 |
|
0 |
|a Integrated circuits
|x Inspection
|v Congresses
|
| 650 |
|
0 |
|a Integrated circuits
|x Measurement
|v Congresses
|
| 650 |
|
0 |
|a Microlithography
|x Congresses
|
| 700 |
1 |
|
|a Herr, Daniel J. ,
|e author
|
| 710 |
1 |
1 |
|a The International Society for Optical Engineering
|
| 710 |
1 |
2 |
|a Society of Photo-optical Instrumentation Engineers
|
| 999 |
|
|
|a 1000099379
|b Book
|c Close Access
|e Gong Badak Campus
|
| 999 |
|
|
|a 1000099380
|b Book
|c Close Access
|e Gong Badak Campus
|