Metrology, inspection, and process control for microlithography XVII
| Main Author: | |
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| Corporate Authors: | , |
| Format: | Book |
| Published: |
Washington :
SPIE ,
c2003
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| Series: | SPIE proceedings series
5038 |
| Subjects: |
| Physical Description: | 2 v.(xxvii, 1248 p.) : ill.(some col.) ; 28 cm. |
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| Bibliography: | Includes bibliographical references and author index |
| ISBN: | 0819448435 |