Metrology, inspection, and process control for microlithography XVII
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| Corporate Authors: | , |
| Format: | Book |
| Published: |
Washington
SPIE
c2003
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| Series: | SPIE proceedings series
5038 |
| Subjects: |
| Physical Description: | 2 v.(xxvii, 1248 p.) ill.(some col.) 28 cm |
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| ISBN: | 0819448435 |