APA (7th ed.) Citation

Herr, D. J. (2003). Metrology, inspection, and process control for microlithography XVII. SPIE.

Chicago Style (17th ed.) Citation

Herr, Daniel J. Metrology, Inspection, and Process Control for Microlithography XVII. Washington: SPIE, 2003.

MLA (9th ed.) Citation

Herr, Daniel J. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE, 2003.

Warning: These citations may not always be 100% accurate.