MEMS/MOEMS advances in photonic commmunications, sensing, metrology, packaging and assembly - Behringer, Uwe F.W.; The International Society for Optical Engineering (Washington SPIE, 2003)
Keywords: Mechatronics -- Congresses; Microelectromechanical systems -- Technological innovations -- Congresses; Microelectronic packaging -- Technological innovations -- Congresses; Optical communications -- Technological innovations -- Congresses; Optoelectronic devices -- Design and construction -- Congresses