Engineering thin films and nanostructures with ion beams
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| Format: | Book |
| Published: |
Boca Raton, FL :
Taylor & Francis ,
2005
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| Physical Description: | 574 p. : ill. ; 24 cm. 1 CD-ROM (4 3/4 in) |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 082472447X 9780824724474 |