Microchip fabrication : a practical guide to semiconductor processing
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
McGraw-Hill ,
c2004
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| Edition: | 5th ed |
| Subjects: |
Table of Contents:
- 1. The semiconductor industry
- 2. Properties of semiconductor materials and chemicals
- 3. Crystal growth and silicon wafer preparation
- 4. Overview of wafer fabrication
- 5. Contamination control
- 6. Productivity and process yields
- 7. Oxidation
- 8. The ten-step patterning process--surface preparation to exposure
- 9. The ten-step patterning process--dveloping to final inspection
- 10. Advanced photolithography processes
- 11. Doping
- 12. Layer deposition
- 13. Metallization
- 14. Process and device evaluation
- 15. The business of wafer fabrication
- 16. Introduction to devices and integrated circuit formation
- 17. Introduction to integrated circuits
- 18. Packaging