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060523s2004 nyu eng |
| 020 |
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|a 0071432418
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| 090 |
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|a TK7871.85
|b .V36 2004
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| 100 |
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|a Van Zant, Peter ,
|e author
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| 245 |
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|a Microchip fabrication :
|b a practical guide to semiconductor processing
|c Peter Van Zant
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| 250 |
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|a 5th ed
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| 260 |
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|a New York :
|b McGraw-Hill ,
|c c2004
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| 300 |
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|a xiii, 642 p. :
|b .ill. ;
|c 24 cm.
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| 504 |
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|a Includes bibliographical references and index
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| 505 |
1 |
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|a 1. The semiconductor industry -- 2. Properties of semiconductor materials and chemicals -- 3. Crystal growth and silicon wafer preparation -- 4. Overview of wafer fabrication -- 5. Contamination control -- 6. Productivity and process yields -- 7. Oxidation -- 8. The ten-step patterning process--surface preparation to exposure -- 9. The ten-step patterning process--dveloping to final inspection -- 10. Advanced photolithography processes -- 11. Doping -- 12. Layer deposition -- 13. Metallization -- 14. Process and device evaluation -- 15. The business of wafer fabrication -- 16. Introduction to devices and integrated circuit formation -- 17. Introduction to integrated circuits -- 18. Packaging
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| 650 |
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|a Integrated circuits
|x Design and construction
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| 650 |
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|a Semiconductors
|x Design and construction
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| 999 |
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|a 1000106291
|b Book
|c OPEN SHELF (30 DAYS)
|e Gong Badak Campus
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