Microchip fabrication : a practical guide to semiconductor processing
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| Format: | Book |
| Language: | English |
| Published: |
New York :
McGraw-Hill ,
c2004
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| Edition: | 5th ed |
| Subjects: |
| Physical Description: | xiii, 642 p. : .ill. ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0071432418 |