rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Handbook of semiconductor silicon technology
  name:
    name part: Herring, Robert B.
    role:
      role term: author
  name:
    name part: Hunt, Lee P. [ (Lee Philip)]
    role:
      role term: author
  name:
    name part: O'Mara, William C.
    role:
      role term: author
  type of resource: text
  origin info:
    place:
      place term: New Jersey
    publisher: Noyes Pub.
    date issued: 1990
    issuance: monographic
  physical description:
    form: print
    extent: xx, 795 p. ; 24 cm.
  note: edited by William C. O'Mara, Robert B. Herring, Lee Philip Hunt
  note: Includes bibliographical references and index
  subject:
    topic: Semiconductors
    topic: Handbooks, manuals, etc
  subject:
    topic: Silicon crystals
    topic: Handbooks, manuals, etc
  identifier: 0815512376
  record info:
    record creation date: 021119
    record change date: 20180111093000.0
    record identifier: 0000030049