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20170530.0 |
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021119n |
| 090 |
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|a TK7874
|b .H3494 1991
|
| 245 |
0 |
0 |
|a Handbook of VLSI microlithography :
|b principles, technology and applications
|c edited by William B. Glendinning, John N. Helbert
|
| 260 |
2 |
|
|a New Jersey :
|b Noyes Pub. ,
|c 1991
|
| 300 |
|
|
|a xxii, 649 p. ; ;
|c 24 cm.
|
| 504 |
|
|
|a Includes bibliographical references and index
|
| 650 |
|
0 |
|a Integrated circuits
|x Very large scale integration
|
| 650 |
|
0 |
|a Microlithography
|
| 700 |
0 |
|
|a Glendinning, William B. ,
|e author
|
| 700 |
0 |
|
|a Helbert, John N. ,
|e author
|
| 999 |
|
|
|a 1000054803
|b Book
|c Close Access
|e Gong Badak Campus
|