Handbook of VLSI microlithography : principles, technology and applications

Handbook of VLSI microlithography : principles, technology and applications

Bibliographic Details
Main Authors: Glendinning, William B. (Author), Helbert, John N. (Author)
Format: Book
Published: New Jersey : Noyes Pub. , 1991
Subjects:
Integrated circuits > Very large scale integration
Microlithography
Description
Physical Description:xxii, 649 p. ; ; 24 cm.
Bibliography:Includes bibliographical references and index

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