APA (7th ed.) Citation

Glendinning, W. B., & Helbert, J. N. (1991). Handbook of VLSI microlithography: Principles, technology and applications. Noyes Pub..

Chicago Style (17th ed.) Citation

Glendinning, William B., and John N. Helbert. Handbook of VLSI Microlithography: Principles, Technology and Applications. New Jersey: Noyes Pub., 1991.

MLA (9th ed.) Citation

Glendinning, William B., and John N. Helbert. Handbook of VLSI Microlithography: Principles, Technology and Applications. Noyes Pub., 1991.